TMXPERT 4PP

TMXpert 4PP image

In-line 4-Point Probe Resistivity Measurement

Resistivity measurement of a wafer or any other surfaces (sheet resistance) using four in line probes of constant spacing contacting the surface of the material. A current is passed through the outer two probes and voltage is measured from the inner probes.

Correction Factor Compensation

Resistivity is calculated based on user determined correction factors based on the geometry of the sample (e.g. thickness t of insulating or conducting substrate, distance D and length between pin and edge L).

TMXpert for Resistivity

The TMXpert curve tracing software manages the tests, displays graph, displays datalog and automatically saves data into a user specifiable folder. Upon completion a test, the statistical mean, minimum, maximum and standard deviation are auto-calculated. A summary report of the testing may be generated showing the graph and data.

Example of TMXpert 4PP measurement

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